Exploring tribological characteristics of ZrN-MoSN composite films fabricated via RF magnetron sputtering: Insights from microstructure and performance analysis

Abstract

Achieving the stringent demands of sustainable tribological industrial applications poses a significant challenge, particular in optimizing the self-lubricant performance of nitride-based films. This paper tackled this challenge by designing and depositing a series of ZrN-MoSN composite films with varying (Mo + S)/Zr ratios, employing RF magnetron sputtering, aimed to enhance the tribological properties through utilizing the high loading capacity of the ZrN matrix and the exceptional self-lubricating attributes of Mo-S-N additives. After conducting thorough investigations on the microstructure, and tribological properties, the results revealed that the dense columnar structured ZrN-MoSN composite films displayed a polycrystalline composition comprising fcc-ZrN and hcp-MoS2 phases, intertwined with amorphous phases of Mo(SN)x and MoS2(N2). (Mo + S)/Zr ratios below 1.08 exhibited a minor impact on the room temperature (RT) tribological properties, while higher ratios led to degradation on RT average friction coefficient (COF) and wear rate (WR). However, the synergistic effect of ZrN matrix and the tribo-phases of layered MoO3 and hard ZrO2 contributed to the significant enhanced 500 °C tribological properties, particularly with an optimized (Mo + S)/Zr ratio of 0.43.