Please use this identifier to cite or link to this item: https://hdl.handle.net/10316/112414
Title: Effect of Substrate Bias Voltage on Microstructure and Mechanical Properties of Cr-Nb-Ti-Zr-N-O Ceramic Thin Films Produced by Reactive Sputtering
Authors: Ataie, Sayed Alireza
Qashqay, S. Mahmoudi
Zamani-Meymian, Mohammad Reza
Ferreira, Fábio 
Keywords: thin film; ceramic coating; fractal parameters; indentation; scratch
Issue Date: 2023
Publisher: MDPI
Project: UIDB/00285/2020 
LA/P/0112/2020 
Serial title, monograph or event: Coatings
Volume: 13
Issue: 7
URI: https://hdl.handle.net/10316/112414
ISSN: 2079-6412
DOI: 10.3390/coatings13071141
Rights: openAccess
Appears in Collections:I&D CEMMPRE - Artigos em Revistas Internacionais
FCTUC Eng.Mecânica - Artigos em Revistas Nacionais

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