Utilize este identificador para referenciar este registo: https://hdl.handle.net/10316/4217
Título: Property change in multifunctional TiCxOy thin films: Effect of the O/Ti ratio
Autor: Fernandes, A. C. 
Carvalho, P. 
Vaz, F. 
Lanceros-Méndez, S. 
Machado, A. V. 
Parreira, N. M. G. 
Pierson, J. F. 
Martin, N. 
Palavras-chave: Titanium oxycarbide; Sputtering; Structure; Resistivity
Data: 2006
Citação: Thin Solid Films. 515:3 (2006) 866-871
Resumo: TiCxOy films with various O/Ti ratios have been deposited by DC magnetron sputtering, using C pieces incrusted in a Ti target erosion area. Composition analysis revealed the existence of three different growth regimes: (i) zone I, corresponding to films with metallic-like appearance, and atomic ratios O/Ti below one; (ii) zone II, with films revealing interference-like colours, and atomic ratios O/Ti higher than 2. Between these two regions, there was a transition zone T, where the atomic ratio O/Ti is between one and two. The films within this zone revealed a brown colour. X-ray diffraction (XRD) structural characterization results showed an evolution from a mixed Ti(C,O) phase at lower O/Ti ratio, to a quasi-amorphous structure within zone T, and poorly crystallized rutile and anatase TiO2 at the highest O/Ti ratios (zone II). These different structural arrangements resulting from different film's compositions had clear effects on electrical resistivity, whose values increased from about 7 × 102 to 2 × 1011 [mu][Omega] cm with increase of the O/Ti ratio. Fourier-transform infrared spectroscopy (FTIR) was used to further confirm the different nature of films structure and, thus, to better understand their properties variation. The observed behaviour was found to be in straight correlation with those of XRD.
URI: https://hdl.handle.net/10316/4217
DOI: 10.1016/j.tsf.2006.07.047
Direitos: openAccess
Aparece nas coleções:FCTUC Eng.Mecânica - Artigos em Revistas Internacionais

Ficheiros deste registo:
Ficheiro Descrição TamanhoFormato
filee393a026755c4db792f59d189e697b5a.pdf384.94 kBAdobe PDFVer/Abrir
Mostrar registo em formato completo

Citações SCOPUSTM   

42
Visto em 9/nov/2022

Citações WEB OF SCIENCETM
20

46
Visto em 2/mai/2023

Visualizações de página 50

437
Visto em 26/mar/2024

Downloads

297
Visto em 26/mar/2024

Google ScholarTM

Verificar

Altmetric

Altmetric


Todos os registos no repositório estão protegidos por leis de copyright, com todos os direitos reservados.