Please use this identifier to cite or link to this item: http://hdl.handle.net/10316/4291
Title: Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings
Authors: Carvalho, S. 
Rebouta, L. 
Cavaleiro, A. 
Rocha, L. A. 
Gomes, J. 
Alves, E. 
Keywords: Nanocomposites; Superhard coatings; Ti-Si-Al-N; Microstructure; Thermal stability; Wear coefficient
Issue Date: 2001
Citation: Thin Solid Films. 398-399:(2001) 391-396
Abstract: In this work (Ti,Si,Al)N films were deposited using only rf or a combination of rf and d.c. reactive magnetron sputtering. Chemical composition, thickness, film structure and mechanical properties of the films were investigated by means of Rutherford backscattering (RBS), electron microprobe analysis (EPMA), ball-cratering, X-ray diffraction (XRD) and ultramicroindentation, respectively. All samples showed high hardness values, exceeding, in some cases, 50 GPa. XRD results revealed the formation of a mixture of two phases whose structure is similar to TiN. One phase is noted as being TiN bulk with a lattice parameter of 0.428 nm and develops only in conditions of high surface mobility. This behaviour can be associated with the segregation of the SiNx phase, though the formation of an amorphous AlN phase cannot be excluded. Another phase, which is noted as Ti---Si---Al---N (a[approximate]0.420 nm), where Si and Al atoms substitute the Ti atoms on the TiN lattice, develops in situations of lower surface mobility. The thermal stability of these coatings was studied by thermal treatments in a vacuum atmosphere, where it was found that a small increase in hardness was obtained after 1 h heat treatment at 800°C.
URI: http://hdl.handle.net/10316/4291
Rights: openAccess
Appears in Collections:FCTUC Eng.Mecânica - Artigos em Revistas Internacionais

Files in This Item:
File Description SizeFormat
file20fc6fbe02c14d4bbae0bb4d860c5c97.pdf138.34 kBAdobe PDFView/Open
Show full item record

Page view(s) 50

335
checked on Oct 2, 2019

Download(s)

51
checked on Oct 2, 2019

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.