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Title: Structural evolution in ZrNxOy thin films as a function of temperature
Authors: Cunha, L. 
Vaz, F. 
Moura, C. 
Rebouta, L. 
Carvalho, P. 
Alves, E. 
Cavaleiro, A. 
Goudeau, Ph. 
Rivière, J. P. 
Keywords: Zirconium oxynitride; PVD coatings; Decorative coatings; Heat treatment
Issue Date: 2006
Citation: Surface and Coatings Technology. 200:9 (2006) 2917-2922
Abstract: Single-layered zirconium oxynitride (ZrNxOy) thin films have been deposited on steel substrates, at a constant temperature of 300 °C, by radiofrequency (rf) reactive magnetron sputtering of a pure Zr target in an argon-oxygen-nitrogen atmosphere. The variation of the flow rate of the reactive gases enabled changes in the composition and structure of the films. X-ray diffraction (XRD) and glancing incidence X-ray diffraction (GIXRD) were used to study the as-deposited films and their structural changes during or after heat treatment, from 400 to 900 °C, in controlled atmosphere and in vacuum.
Rights: openAccess
Appears in Collections:FCTUC Eng.Mecânica - Artigos em Revistas Internacionais

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