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dc.contributor.authorSilva, Carlos W. Moura e-
dc.contributor.authorAlves, E.-
dc.contributor.authorRamos, A. R.-
dc.contributor.authorSandu, Cosmin S.-
dc.contributor.authorCavaleiro, A.-
dc.identifier.citationVacuum. 83:10 (2009) 1213-1217en_US
dc.description.abstractIn this work, the lack of adhesion occurred during the up-scaling of the deposition of tribological coatings in a semi-industrial apparatus is interpreted. The adhesion problems were detected for both hard and self-lubricant coatings from W-Ti-N and W:C systems, respectively, when they were deposited in a 4 cathodes TEER® chamber by reactive unbalanced magnetron sputtering. In spite of cleaning the substrates surface by ion bombardment prior to deposition, by establishing a discharge close to the substrate, insufficient adhesion critical load values were measured by scratch-testing. A powerful set of complementary techniques was used to the detailed analysis of the interfaces in order to understand and overcome the adhesion problems: RBS gave some insights on the nature of the problem by detecting composition anomalies in the substrate/coating interface; Auger spectroscopy was used for identifying the underneath chemical composition close to the interface; cross section TEM gave the final evidence of the presence of a contamination layer attributed to malfunctioning of the ion cleaning process, which was the cause of the lack of adhesionen_US
dc.publisherElsevier Ltd.en_US
dc.subjectDLC coatingsen_US
dc.subjectContamination layeren_US
dc.subjectIon cleaningen_US
dc.titleAdhesion failures on hard coatings induced by interface anomaliesen_US
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Appears in Collections:FCTUC Eng.Mecânica - Artigos em Revistas Internacionais
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