Please use this identifier to cite or link to this item: http://hdl.handle.net/10316/4285
Title: Influence of Al(Er) interlayer on the mechanical properties of AlN(Er) coatings
Authors: Oliveira, J. C. 
Cavaleiro, A. 
Vieira, M. T. 
Keywords: Aluminium nitride; Sputtering; Interlayer; Adhesion
Issue Date: 2002
Citation: Surface and Coatings Technology. 151-152:(2002) 466-470
Abstract: AlN(Er) thin films were deposited by sputtering on M2 steel (AISI) and Si substrates with different thickness of an Al(Er) interlayer. No significant variations were observed in the chemical composition and structure of the AlN(Er) films. The films in all cases presented excess nitrogen in relation to AlN stoichiometry. The diffraction peaks were strongly shifted to lower angles due to the presence of Er. The hardness of the films is approximately 32 GPa and does not change with the thickness of the Al(Er) interlayer. The cohesion and adhesion of the AlN(Er) films were improved with the inclusion of the Al(Er) interlayer; the cohesive and adhesive critical load values increased from 7 and 17 N to 15 and 27 N, respectively.
URI: http://hdl.handle.net/10316/4285
Rights: openAccess
Appears in Collections:FCTUC Eng.Mecânica - Artigos em Revistas Internacionais

Files in This Item:
File Description SizeFormat
file03600353a1ce44058a6d82ce9d8d7023.pdf455.43 kBAdobe PDFView/Open
Show full item record

Page view(s)

104
checked on Oct 1, 2019

Download(s)

47
checked on Oct 1, 2019

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.