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https://hdl.handle.net/10316/4235
Title: | Determination of the sp3 C content of a-C films through EELS analysis in the TEM | Authors: | Galvan, D. Pei, Y. T. Hosson, J. Th. M. De Cavaleiro, A. |
Keywords: | sp3/sp2 | Issue Date: | 2005 | Citation: | Surface and Coatings Technology. 200:1-4 (2005) 739-743 | Abstract: | Electron energy loss spectroscopy (EELS) in a transmission electron microscope (TEM) was employed to estimate the sp3 C content in magnetron sputtered H-free a-C coatings. The deconvolution procedure developed reduces considerably the error which is due to beam point spread function and sample thickness. The methodology has been applied to thin a-C films deposited through RF magnetron sputtering, and determined that, under the present values of ion current to the substrates (<Â 1 mA/cm2), a variation in energy of the upcoming ions (achieved through a variation in applied substrate bias) has a negligible influence on the C atoms hybridization. | URI: | https://hdl.handle.net/10316/4235 | DOI: | 10.1016/j.surfcoat.2005.02.071 | Rights: | openAccess |
Appears in Collections: | FCTUC Eng.Mecânica - Artigos em Revistas Internacionais |
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