Tribological characterization of tungsten nitride coatings deposited by reactive magnetron sputtering

Abstract

The structure, hardness, friction and wear of tungsten nitrides prepared by d.c. reactive magnetron sputtering were investigated. The coatings were deposited with different nitrogen to argon ratios; the total pressure was kept constant. The tribological tests were performed on a pin-on-disc tribometer in terrestrial atmosphere with 100Cr6 steel, Al2O3 and Si3N4 balls as sliding counter-bodies. The wear tracks, the ball-wear scars and the wear debris were analysed by scanning electron microscopy in order to characterize the dominant wear mechanisms.