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Title: Influence of air oxidation on the properties of decorative NbOxNy coatings prepared by reactive gas pulsing
Authors: Chappé, J. M. 
Carvalho, P. 
Lanceros-Mendez, S. 
Vasilevskiy, M. I. 
Vaz, F. 
Machado, A. V. 
Fenker, M. 
Kappl, H. 
Parreira, N. M. G. 
Cavaleiro, A. 
Alves, E. 
Keywords: Niobium oxynitride; Reactive sputtering; Structure; Hardness; Optical reflectance
Issue Date: 2008
Citation: Surface and Coatings Technology. 202:11 (2008) 2363-2367
Abstract: In this work the oxidation resistance of DC reactive sputtered niobium oxynitrides and its influence on the properties of the films are studied. The depositions have been carried out by DC magnetron sputtering with a reactive gas pulsing process. The nitrogen flow was kept constant and the oxygen flow was pulsed. Pulse durations of 10 s produced multilayer coatings with a period of [lambda] = 10 nm. Three sets of films with increasing duty cycle (= on-time of high oxygen flow / pulse duration) have been deposited. The films were subsequently annealed in air at 400, 500 and 600 °C, respectively.
Rights: openAccess
Appears in Collections:FCTUC Eng.Mecânica - Artigos em Revistas Internacionais

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